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Persona de contacto elaine
Hefei, Anhui
Small
intelligent type PECVD,PECVD-S***0A
Main features：
Small size,full
function，Suitable for laboratory sample preparation and
plasma treatment.
Set vacuum unit,
gas supply system, RF source, automatic propulsion, heating furnace
in on.All the controls are integrated into the touch screen control
interface to make the device more intelligent and easy to
operate.
Adjustable power
range ****0W; adjustable temperature range: *******0 degrees;
adjustable sputtering region: *****0mm; application: metal film,
ceramic film, composite film, continuous growth of various films,
etc. Expandable plasma cleaning etching and other
functions.
Furnace
| Max. temp | ***0°C |
| Heating zone length | **0mm |
| Constant zone length | **0mm |
| Temp. control | PID automatic control with *0 steps programmable，Operation interface is 7 "industrial control computer |
| Tube size | *5，,*0（optional） |
| Signal frequency | *3.*6 MHz±0.**5% |
| Power output range | ****0W |
| Gas supply system | Accurate control of gas flow with high precision mass Flowmeter |
| Mass Flowmeter reference range（N2) | **0sccmã€**0sccm **0sccm （optional） |
| Accuracy | ±1.5% |
| Repeatability precision | ±0.2% |
| Working pressure difference range | 0.1～0.5 MPa |
| Max. pressure | 3MPa |
| Vacuum unit | KF*5 series bellows and manual stopper valves |
| vacuum | ***1 pa |
| The value can be displayed intuitively by the digital display vacuum tester | |
| País: | China |
| N º de Modelo: | - |
| Precio FOB: | Obtener el precio más reciente |
| Lugar de origen: | - |
| Precio de pedido mínimo: | - |
| Cantidad de pedido mínimo: | - |
| Detalle de embalaje: | - |
| El tiempo de entrega: | - |
| Capacidad de suministro: | - |
| Tipo de pago: | - |
| Grupo de productos : | - |
