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Persona de contacto elaine
Hefei, Anhui
Plasma enhanced
rotational PECVD system,
BTF****0C-R-PECVD
Product description：
The whole experimental cavity is in the glow
generation region, uniform equivalent glow, this technology is a
good solution to the traditional plasma work instability, In this
way, the range and intensity of ionization is **0 times of that of
the traditional PECVD, to the uneven accumulation of materials
.
Use a quartz tube of a special shape (thin
middle between two ends) as a reaction chamber for chemical vapor
deposition.The furnace tube can rotate **0 degrees, Quartz stopper
on the inner wall of the tube can help stir-fry the powder material
and sintered more evenly, and the furnace body can be tilted to the
left and right at a large angle, which is convenient to feed in and
out, and the inclined angle is adjustable from 0 to *5
degree.
Widely used in the preparation of graphene at
low temperature and the carbon coating experiment of powder
material.
Main parameter：
| Furnace | |
| Max. Tem |
***0°C |
| Heating zone length | **0mm |
| Constant zone length | **0mm |
| Tem. control | PID automatic control with *0 steps programmable，Operation interface is 7 "industrial control computer |
| Tube Size | Φ*0***0+Φ**0***0+Φ*0***0mm |
| Furnace body inclination angle | 0~*5°ï¼ˆadjustable） |
| Furnace tube rotation rate | 3~*3r/min |
| PE source | |
| Signal frequency | *3.*6 MHz±0.**5% |
| Power output range | ****0W |
| Max. reflection power | **0W |
| RF output interface | *0 Ω, N-type, female |
| Power stability | ≤5W |
| Gas supply system | High precision mass Flowmeter（Range optional） |
| Accuracy | ±1.5% |
| Response accuracy | ±0.2% |
| Response time |
Gas characteristics：1～4sec Electrical characteristics ：*0sec |
| Working pressure difference range | 0.1～0.5MPa |
| Max. pressure | 3MPa |
| Connection | Φ6mmDouble clasp stainless steel joint |
| Vacuum unit | KF*5 series bellows and manual stopper valves |
| Vacuum degree | ***1 pa |
|
The value can be displayed intuitively
by the digital display vacuum tester |
|
| País: | China |
| N º de Modelo: | - |
| Precio FOB: | Obtener el precio más reciente |
| Lugar de origen: | - |
| Precio de pedido mínimo: | - |
| Cantidad de pedido mínimo: | - |
| Detalle de embalaje: | - |
| El tiempo de entrega: | - |
| Capacidad de suministro: | - |
| Tipo de pago: | - |
| Grupo de productos : | - |
