Descripción del producto
I,
Usage:
This equipment is vertical with such
functions as high vacuum, inflation and high-temperature melting
directional solidification and so on. It is the preferred furnace
for melting silicon and making silicon ingots. Meanwhile, after
added with the plasma heat source, it can meet part of the
purification requirements
II, Characteristics:
1. Short production
cycle of each furnace :Heating and melting can be completed within
*6 hours, crystallization process *5 hours, tempering 3 hours, and
cooling *2 hours. The total time is within *6 hours.
2. low maintenance
costs.
3. Easy replacement of
thermal field, the thermal field with up and down split is
easy to replace.
4. Safer due to a
variety of protective measures, so far it has been found that no
security incidents caused by silicon leakage happened after user’s
operation.
5. High degree of
automation, using PLC + HMI (human machine interface) to
achieve that one set to complete the whole process.
6, Patented structure
makes larger temperature gradient from top to bottom.
It makes larger temperature
difference from top to bottom in the thermal field to use patented
ingot structure. Meanwhile ingot casting has purifying ability,
even if the raw material is 4N, it can produce more than 5N
polysilicon.
III, Main Technical
Parameters
|
Model
|
Name
|
Rated power
|
Rated tempe-
rature
|
Crucible volumn
(liquid)
|
Directed solidification
speed
|
Cold ultimate
vacuum
|
|
ZT*3D
|
Polysilicon dual-chamber directional
solidification furnace
|
**0KW
|
***0℃
|
3KG
|
***5mm/hour
|
6.*7×***3Pa
|
|
ZT**0D
|
Polysilicon directional solidification
furnace
|
**0KW
|
***0℃
|
*0kg
|
***5mm/hour
|
6.*7×***3Pa
|
|
ZT***0D
|
Polysilicon directional solidification
furnace
|
**5KW
|
***0℃
|
**0KG
|
***5mm/hour
|
6.*7×***1Pa
|
|
ZT***0D
|
Polysilicon directional solidification
furnace
|
**0KW
|
***0℃
|
**0KG
|
***5mm/hour
|
6.*7×***1Pa
|
IV, Structure Description
With vertical structure, it is made
of furnace body, heat sensor heating (users can choose resistance
heating as the heat body), insulation layer, directed crystallizer,
moving elevating gear，operating platform , pneumatic system,
power supply with its control system, and vacuum system.
1. The furnace shell is under dual
water-cooled head-sealed layer structure with polishing stainless
steel (No.**4 or No.**6L material) inner layer and high-quality
anti-proof carbon steel outer layer.
2. The furnace shell is equipped
with rotary observation window and explosion-proof holes, with the
blowing blender at the top and lifting structure to meet the
purification requirements.
3. The furnace hearth is under dual
water-cooled head-sealed layer structure with polishing stainless
steel (No.**4 or No.**6L material) inner layer and high-quality
anti-proof carbon steel outer layer. The hearth and the body are
connected actively, and the hearth’s lifting is controlled by
hydraulic pressure.
4. The insulation layer is composed
by the hard carbon felt, and is supported on the insulation layer.
There is an air exit hole in the middle of upper insulation layer,
and the graphite heating element is wrapped by the insulation layer
beside the crucible. Users afford the quartz crucible
themselves.
5. The sensor is abnormal shaped
copper coil which has multi-turn circle structure. The coil
connects the furnace body through insulating columns, and the coil
connects the copper bars through clicking.
6. The moving lifting structure is
divided into fast one and slow one to ensure the smooth lifting.
The moving speed can be adjusted from 5 to *5mm per hour, and the
displacement is shown by linear potentiometer(or Optical
grating).
7. The vacuum system is made of a
mechanical pump, diffusion pump, oil diffusion pump, pneumatic
valves, piping baffle and so on.
8. The temperature control loop is made of temperature controller
and thermocouple, which directly controls the DC voltage and power,
and the lifting speed is adjusted by the frequency or servo.The
controller is made by Honeywell in US, or Yuguang in China, with
multi-segment program-control. Displacement is instructed by
digital display meter. The electric control cabinet is the Siemens
standard one, and the panel is equipped with graphic simulation
screen which indicates the current operation conditions of various
components. The motion control is provided by a Omron PLC
programmable equipment.
| País: |
China |
| N º de Modelo: |
EF-PSICF
|
| Precio FOB: |
(Negociable)
Obtener el precio más reciente
|
| Lugar de origen: |
- |
| Precio de pedido mínimo: |
- |
| Cantidad de pedido mínimo: |
1 set |
| Detalle de embalaje: |
- |
| El tiempo de entrega: |
- |
| Capacidad de suministro: |
- |
| Tipo de pago: |
- |
| Grupo de productos : |
New Energy Equipment
|
