Description

7 Metrology Instruments •Hitachi S***0 Scanning Electron Microscope •LEO FE-SEM model **2 •Micrion FIB model M***0 •Hitachi FE-SEM model S****0 •Hitachi FE-SEM model S****0 •Hitachi S****0 SEM Cold Field Emission SEM System •CD-SEM/SEM/FIB •Hitachi S****0 CD SEM •Hitachi S****0 CD SEM_SDI •Tencor Thin Film Monitor TF*1 •Refurbished Tencor/ KLA-Tencor M-Gage **0 8 Other Used Systems •Tegal **3 •Drytek Megastrip 6 ***** •LFE PDS/PDE **1/PDE **4 •Tok Plasma Asher •Tegal ***3e •in2 Series Manipulators •Spin Cleaner/Etcher Sass Four •Tegal Table and Gas Cabinet •Flammable Liquid Storage Cabinet •SVG Develop ***6/***6 •Used Gas Cabinets for Semiconductor •Solvent Sink •Peak ALP ***0 RTP •Semitool VERTEQ SRD ******4 •RF Termaline Dummy Load ***1 •Tel Plasma Etcher **0C •FTG**2 •SEMITOOL VERTEQ SRD •RF Termaline Dummy Load ***0 •RF Dummy Load 8XXX •Vacuum Heating Furnace •Chiller:FTS System-Maxi Cool •Chiller:Chillers •RF Dummy Load *******0 •RF Dummy Load ***1 •Chiller Bay Voltex HS •Power •Vacuum Pumps •Chiller:NesLab System III blue •Chiller:Neslab System II •Chiller:Tek Temp TKD**0/***8TL •Chiller:SMC INR******2A •Chiller:FTS Systems RC **2 •Chiller:FTS System RC*****7 •Chiller:Tek Temp R *2 •Chiller:Neslab System III •Semitool SAT ***0S •Clean Room Ovens •SEMITOOL WST **6 MG Wet Solvent Stripper 9 Backside •Dynatex DX-III Scriber/Breaker •WaferDemount AW **0 •Plasma Asher*-Gasonics Aura ***0 •Plasma Asher**- GaSonics Aura ***0LL *0 Electrical Test •Temptronic TP****0 •Rucker and Kolls Model **0J Probing Station •Refurbished ELECTROGLAS HORIZON ***5X •SIGNATONE S***0 Probe •Refurbished EG ***4 •Refurbished EG ***1 •Refurbished MP ***0 •Refurbished HP ***5B •Refurbished HP ***2UX •Refurbished HP ***5 •Electrical Test and PCM Testing Module Design