Description

Manufacturer:Branson Refurbished by:Allwin*1 Corp The Branson IPC ***0 is a barrel plasma etcher that uses oxygen to etch organic films and residues such as photoresist in a process commonly referred to as "de-scumming." During a normal run for the Branson Barrel Etcher, the chamber is evacuated to under 0.5 torr pressure. A regulated flow of oxygen gas is introduced into the chamber and RF energy is applied to the chamber coils, which creates an oxygen plasma which does the etching. The oxygen ions in the plasma react with organics, such as photoresist, oxidizing or descumming the compounds off of the surface. The oxidized organics are pumped out of the Branson Barrel Etcher&#**9;s chamber as exhaust gas. Allwin*1 Corp. can also provide AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Branson tools which provides the following significant advantages. * Auto processing with RF, gas flow and timer set up * 1 process gas with MFC * Upgrade with new software and controller * Touch screen * 4 gases by MFC(Optionï&frac*4;Œ*0 sccm up to ****0 sccmï&frac*4;Œcontrol up to 6 valves include main vacuum valve and vent or purge *****) * Baratron to read the pressure(Option) * Throttle valve to control the pressure to keep the process repeatable(Option) * ENI RF generator either ACG series(Option) without water cooling or EOM*6, OEM**2b(Option) series with cooling water Allwin*1 Corp can provide the following refurbished plasma asher/descum equipment. Refurbished Matrix **5 Refurbished Matrix **5 Refurbished Matrix *0 Refurbished Gasonics Aura ***0 Refurbished Gasonics Aura ***0 Refurbished Gasonics Aura ***0 Refurbished Gasonics L***0 Refurbished Branson IPC ***0 Refurbished Branson IPC L***0