Description

Manufacturer:Matrix Integrated Systems Refurbished by:Allwin*1 Corp Matrix is a Registered Trademark of Matrix Integrated Systems, ***** **5 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 3” up to 6”. By maintaining independent closed-loop system controls, the system optimizes vital device parameters. Matrix**5 Applications Photoresist Stripping High dose implant (As+, B+, P+) Post-polysilicon etch Post-metal etch Post-oxide etch Rework Controlled Resist Removal Post-develop descum (pre-etch) Dry/wet process capability Resist planarization Uniformity capability (5% 1s) GaAs wafer Stripping and Descum Thin Film Head Resist Cleaning and Surface Treatment MEMS (Micro Electro- Mechanical Systems) Up to 4 hour processes Allwin*1 Corp. can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix **5 which provides the following significant advantages. Plasma Asher Stripper Descum In semiconductor manufacturing plasma asher/stripper is the process of removing the photoresist from an etched wafer. Using a plasma source, a monatomic reactive species is generated. Oxygen or fluorine are the most common reactive species. The reactive species combines with the photoresist to form ashing which is removed with a vacuum pump. Allwin*1 Corp can provide the following refurbished plasma asher/descum equipment. Refurbished Matrix **5 Refurbished Matrix **5 Refurbished Matrix *0 Refurbished Gasonics Aura ***0 Refurbished Gasonics Aura ***0 Refurbished Gasonics Aura ***0 Refurbished Gasonics L***0 Refurbished Branson IPC ***0 Refurbished Branson IPC L***0