Description

Manufacturer:Matrix Integrated Systems Refurbished by:Allwin*1 Corp Matrix is a Registered Trademark of Matrix Integrated Systems, ***** model **3 is an electro-mechanical production system used to etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma. Single Wafer, Multi-Step Processing Closed-Loop Temperature Control Pressure Control Accurate, closed-loop pressure control with âï¿&frac*2;ï¿&frac*2;butterfly-styleâï¿&frac*2;ï¿&frac*2; throttle valve and capacitance manometer RF power: **0 to **0 watts Timed cycles up to 4 hour each Allwin*1 Corp. can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix**3 which provides the following significant advantages. New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with *7âï¿&frac*2;ï¿&frac*2; LCD Monitor, standard keyboard and mouse. Software calibration and easy to be done. More functions and I/O hardware âï¿&frac*2;ï¿&frac*2;exposedâï¿&frac*2;ï¿&frac*2; for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is *4 to *6 bits. Detect in process and with color curve displayed on the screen. Robot teach is on the GUI and easy to do the procedure with new concept teaching method. Software watch dog to eliminate machine damage duo to the computer locks up or freeze. Sensor status detect function. On line help function Better performance and maintenance than the original systems Allwin*1 Corp can provide the following refurbished Etcher equipment. Refurbished Matrix**3 Refurbished Matrix**3 Refurbished Gasonics AE***1 Refurbished Gasonics PEP***0 Used Lam Rainbow ***0 Oxide Etch Used Lam***8